Fiber Optic Feedthrough for Laser Operated Interferometers Used
for Precise Wafer Stage Movement
Conax Semiconductor manufactures a full line of fiber optic cable seals for use in the semiconductor industry.
These are useful any time a fiber optic cable needs to pass through a pressure-differential boundary or an area requiring isolation to minimize particle contamination.
A typical application show above is the introduction of a laser into a photolithography tool used for interferometer measurements. Interferometers are used to accurately control stage movement for the proper positioning of the wafer and reticle stages relative to each other. The need for high accuracy in this area will continue to grow as wafer geometries continue to shrink.
