[Piezoresistive Pressure Sensors] 7000 Series Broad Pressure

 

(Piezoresistive Pressure Sensors, 압저항식 압력센서)

 

www.dailibc.com

 

 

The 7000 Series Broad Pressure is ideal for
high-volume, medium-pressure, small-package OEM applications.

Overview

Features

Range       : 15 to 500 psi (1 to 34.5 bar; 103 to 3,447 KPa)

Type         : Absolute, gage, differential and vacuum

Media        : Clean, dry air and non-corrosive gasses

Shipping  :  Wafers on tape

Flexibility  :  Sensitivity, resistance, bridge, constraint, etc.

Benefits

Performance : Enjoy best-in-class performance due to Merit’s proprietary Sentium technology

Cost             : Save money over time with high-performing die

Security       : Feel confident doing business with an experienced company backed

by a solid parent company (NASDAQ: MMSI)

Speed       : Get to market quickly with creative and flexible solutions.

Service       :  Experience prompt, personal and professional support.

 

Specifications 

Parameter	Minimum	Typical	Maximum	Units	Notes
Electrical & Environmental
Excitation		5	15	V	Maximum: 3mA
Impedance	4000	5000	6000	Ω	Optional: 3,500 +/- 500
Operating Temperature	-40		150	°C	Sentium® technology
Storage Temperature	-55		160	°C
Performance
Offset	-10	0	10	mV/V	Zero pressure; gage only; @25°C
Non-linearity	-0.2	0	0.2	% FSO	Best Fit Straight Line; @25°C
Pressure Hysteresis	-0.1	0	0.1	% FSO	@25°C
Temp Coeff - Zero	-25	0	25	µV/V/°C	-40°C to 150°C
Temp Coeff - Resistance	2300	2800	3300	PPM/°C	-40°C to 150°C
Temp Coeff - Sensitivity	-1500	-2200	-2500	PPM/°C	-40°C to 150°C
Thermal Hysteresis	-0.1	0	0.1	% FSO	Zero pressure
Long-Term Stability	-0.1	0	0.1	% FSO
Burst Pressure	3X				Full scale pressure
Full-Scale Output (@ 5 volts) Other outputs available upon request
15 psi (1 bar; 103 KPa)	60	75	90	mV
50 psi (3.4 bar; 345 KPa)	100	125	150	mV
100 psi (6.9 bar 689 KPa)	120	150	180	mV
300 psi (20.7 bar 2,068 KPa)	120	150	180	mV
500 psi (34.5 bar; 3,447 KPa)	140	175	210	mV

 

 

Part Details

 

Dimensions (millimeters, post-cut)

 

 

Standard Bond Pad Metallization = Aluminum

 

 

Absolute also; other contraints available

Electrical

 

Part Number Configurator

Example: 7SO-0300-9T offers 5kohm Impedance, Open Bridge, 100 psi and Gage Constraint

Standard Part Numbers
7SO-1000-5T	8SO-1000-5T
7SO-0500-5T	8SO-0500-5T
7SO-0300-5T	8SO-0300-5T
7SO-0100-5T	8SO-0100-5T
7SO-0070-5T	8SO-0070-5T
7SO-1000-9T	8SO-1000-9T
7SO-0500-9T	8SO-0500-9T
7SO-0300-9T	8SO-0300-9T
7SO-0100-9T	8SO-0100-9T
7SO-0070-9T	8SO-0070-9T
7SH-1000-5T	8SH-1000-5T
7SH-0500-5T	8SH-0500-5T
7SH-0300-5T	8SH-0300-5T
7SH-0100-5T	8SH-0100-5T
7SH-0070-5T	8SH-0070-5T
7SH-1000-9T	8SH-1000-9T
7SH-0500-9T	8SH-0500-9T
7SH-0300-9T	8SH-0300-9T
7SH-0100-9T	8SH-0100-9T
7SH-0070-9T	8SH-0070-9T
7SC-1000-5T	8SC-1000-5T
7SC-0500-5T	8SC-0500-5T
7SC-0300-5T	8SC-0300-5T
7SC-0100-5T	8SC-0100-5T
7SC-0070-5T	8SC-0070-5T
7SC-1000-9T	8SC-1000-9T
7SC-0500-9T	8SC-0500-9T
7SC-0300-9T	8SC-0300-9T
7SC-0100-9T	8SC-0100-9T
7SC-0070-9T	8SC-0070-9T

Note: “T” in part number = sawn wafer on tape in metal frame