반도체용 온도센서 및 실링

반도체 제조용 온도 센서 및 실링

DaiL IBC 2011. 8. 11. 13:22

Temperature Sensor & Sealing Assemblies for

Semiconductor Processing

 

WAFER MANUFACTURING 

 

 

 

3.Staggered, three-point tungsten-rhenium
thermocouple with a sealed inert-gas backfilled
sheath used for calibrating infrared sensors on
epitaxial reactors.


4.Spring-loaded thermocouple with formed
sheath used in an ion implanter.


5. Teflon-jacketed thermocouple for etching
production systems.


6.Sealing gland assembly for sheathed
thermocouples or insulated conductors,for
high-vacuum or pressurized autoclave
process applications

 

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