반도체용 온도센서 및 실링

반도체 제조용 온도 센서 및 실링

DaiL IBC 2011. 8. 11. 13:37

Temperature Sensor & Sealing Assemblies for

Semiconductor Processing

 

WAFER MANUFACTURING 

 

 

 

7.Single-point platinum thermocouple with
molybdenum sheath to manually profile fastresponse
epitaxial reactors.


8.Combination feedthrough for wire and
coolant lines for an ion implanter.

 

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