Piezoresistive Pressure Sensors

[Piezoresistive Pressure Sensors] MS Series Surface-Mountable

DaiL IBC 2011. 12. 15. 21:08

 

(Piezoresistive Pressure Sensors / Uncompensated Packages, 압저항식 압력센서) 
 

 

The MS Series is a surface-mountable device suitable for high-volume, low to medium pressure applications.

Overview
Features
Range      : 15 to 500 psi (1 to 34.5 bar; 103 to 3,447 KPa)
Type        : Absolute, gage, differential and vacuum
Media      : Clean, dry air and non-corrosive gases
Packaging : Substrates, covers, gels, etc.
Flexibility : Sensitivity, resistance, bridge, constraint, etc.
Benefits
Performance : Enjoy best-in-class performance due to Merit’s proprietary Sentium technology
Cost     : Save money over time with high-performing die
Security : Feel confident doing business with an experienced company backed 
                  by a solid parent company (NASDAQ: MMSI)
Speed    : Get to market quickly with creative and flexible solutions.
Service   : Experience prompt, personal and professional support.
 
Specifications
Parameter Minimum Typical Maximum Units Notes
Electrical & Environmental
Excitation 　 5 15 V Maximum: 3mA
Excitation 　 5 15 V Maximum: 3mA
Impedance 4000 5000 6000 Ω Optional: 3,500 +/- 500
Operating Temperature -40 　 150 °C Sentium® technology
Storage Temperature -55 　 160 °C 　
Performance
Offset -10 0 10 mV/V Zero pressure; gage only; @25°C
Non-linearity -0.2 0 0.2 % FSO Best Fit Straight Line; @25°C
Pressure Hysteresis -0.1 0 0.1 % FSO @25°C
Temp Coeff - Zero -25 0 25 µV/V/°C -40°C to 150°C
Temp Coeff - Resistance 2300 2800 3300 PPM/°C -40°C to 150°C
Temp Coeff - Sensitivity -1500 -2200 -2500 PPM/°C -40°C to 150°C
Thermal Hysteresis -0.1 0 0.1 % FSO Zero pressure
Long-Term Stability -0.1 0 0.1 % FSO 　
Burst Pressure 2X 　 　 　 Full scale pressure
Full-Scale Output (@ 5 volts) Other outputs available upon request
15 psi (1 bar; 103 KPa) 60 75 90 mV 　
100 psi (6.9 bar; 689 KPa) 120 150 180 mV 　
300 psi (20.7 bar 2,068 KPa) 120 150 180 mV 　
500 psi (34.5 bar 3,447 KPa) 140 175 210 mV 　
 

 

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