[Piezoresistive Pressure Sensors] 3000 Series Low Pressure

 

(Piezoresistive Pressure Sensors, 압저항식 압력센서) 

 

www.dailibc.com

 

 

The 3000 Series Low Pressure is ideal for
high-volume, low-pressure OEM applications.

Overview

Features

Range    : 5 to 100 psi (.34 to 6.9 bar; 34.5 to 689 KPa)

Type      : Absolute, gage, differential and vacuum

Media     : Clean, dry air and non-corrosive gasses

Shipping : Wafers on tape

Flexibility : Sensitivity, resistance, bridge, constraint, etc.

Benefits

Performance : Enjoy best-in-class performance due to Merit’s proprietary Sentium technology

Cost            : Save money over time with high-performing die

Security       : Feel confident doing business with an experienced company backed by a solid parent company (NASDAQ: MMSI)

Speed         : Get to market quickly with creative and flexible solutions.

Service       : Experience prompt, personal and professional support.

 

Specifications

Parameter	Minimum	Typical	Maximum	Units	Notes
Electrical & Environmental
Excitation		5	15	V	Maximum: 3mA
Impedance	4000	5000	6000	Ω	Optional: 3,500 +/- 500
Operating Temperature	-40		150	°C	Sentium® technology
Storage Temperature	-55		160	°C
Performance
Offset	-10	0	10	mV/V	Zero pressure; gage only; @25°C
Non-linearity	-0.2	0	0.2	% FSO	Best Fit Straight Line; @25°C
Pressure Hysteresis	-0.1	0	0.1	% FSO	@25°C
Temp Coeff - Zero	-25	0	25	µV/V/°C	-40°C to 150°C
Temp Coeff - Resistance	2300	2800	3300	PPM/°C	-40°C to 150°C
Temp Coeff - Sensitivity	-1500	-2200	-2500	PPM/°C	-40°C to 150°C
Thermal Hysteresis	-0.2	0	0.2	% FSO	Zero pressure
Long-Term Stability	-0.2	0	0.2	% FSO
Burst Pressure	3X				Full scale pressure
Full-Scale Output (@ 5 volts) Other outputs available upon request
5 psi (.34 bar; 34.5 KPa)	60	75	90	mV
15 psi (1 bar; 103 KPa)	125	150	175	mV
30 psi (2.1 bar 207 KPa)	120	150	180	mV
50 psi (3.4 bar 345 KPa)	100	125	150	mV
100 psi (6.9 bar; 689 KPa)	125	150	175	mV

 

Dimensions (millimeters, post-cut)

 

         Standard Bond Pad Metallization = Aluminum

 

             

        Absolute also; other contraints available

Electrical

 

Part Number Configurator

 

Example: 3SO-3000-CT offers 5kohm Impedance, Open Bridge, 5 psi and Gage Constraint

Standard Part Numbers
 

3SO-3000-6T	3SC-3000-6T	4SH-3000-6T
3SO-2000-6T	3SC-2000-6T	4SH-2000-6T
3SO-1000-6T	3SC-1000-6T	4SH-1000-6T
3SO-0500-6T	3SC-0500-6T	4SH-0500-6T
3SO-0300-6T	3SC-0300-6T	4SH-0300-6T
3SO-3000-CT	3SC-3000-CT	4SH-3000-CT
3SO-2000-CT	3SC-2000-CT	4SH-2000-CT
3SO-1000-CT	3SC-1000-CT	4SH-1000-CT
3SO-0500-CT	3SC-0500-CT	4SH-0500-CT
3S0-0300-CT	3SC-0300-CT	4SH-0300-CT
3SH-3000-6T	4SO-3000-6T	4SC-3000-6T
3SH-2000-6T	4SO-2000-6T	4SC-2000-6T
3SH-1000-6T	4SO-1000-6T	4SC-1000-6T
3SH-0500-6T	4SO-0500-6T	4SC-0500-6T
3SH-0300-6T	4SO-0300-6T	4SC-0300-6T
3SH-3000-CT	4SO-3000-CT	4SC-3000-CT
3SH-2000-CT	4SO-2000-CT	4SC-2000-CT
3SH-1000-CT	4SO-1000-CT	4SC-1000-CT
3SH-0500-CT	4SO-0500-CT	4SC-0500-CT
3SH-0300-CT	4S0-0300-CT	4SC-0300-CT

  Note: “T” in part number = sawn wafer on tape in metal frame