Piezoresistive Pressure Sensors

Piezoresistive Pressure Sensors (압저항방식 압력센서, surface-mount..)

DaiL IBC 2010. 3. 18. 16:19

 

SMD Series surface-mountable, 7.6mm2

 

 

 

The SMD (surface-mountable device) Series is ideal for
high-volume,low and medium pressure OEM applications.

 

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FEATURES

Range

5 to 500+ psi (.34 to 34.5+ bar; 34.5 to 3,447 KPa)

Type

Absolute, gage, differential and vacuum

Media

Clean, dry air and non-corrosive gasses

Packaging

Substrtes, covers, gels, etc.

Flexibility

Sensitivity, resistance, bridge, constraint, ect.


BENEFITS

Performance

Enjoy best-in-class performance due to Merit's
proprietary Sentium technology

Cost

Save money over time with high-performing die

Security

Feel confident doing business with an experienced
company backed by a solid parent company (NASDAQ: MMSI)

Speed

Get to market quickly with creative and flexible solutions.

Service

Experience prompt, personal and professional support.

 

 

 

 

 

SPECIFICATIONS


 

Parameter

Minimum

Typical

Maximum

Units

Notes

Electrical & Environmental

 

Excitation

5

15

V

Maximum: 3mA

 

Impedance

4000

5000

6000

Ω

Optional: 3,500 +/- 500

 

Operating Temperature

-40

 

150

°C

Sentium® technology

 

Storage Temperature

-55

 

160

°C

 

Performance

 

Offset

-10

0

10

mV/V

Zero pressure; gage only; @25°C

 

Non-linearity

-0.2

0

0.2

% FSO

Best Fit Straight Line; @25°C

 

Pressure Hysteresis

-0.1

0

0.1

% FSO

@25°C

 

Temp Coeff - Zero

-25

0

25

µV/V/°C

-40°C to 150°C

 

Temp Coeff - Resistance

2100

2800

3900

PPM/°C

-40°C to 150°C

 

Temp Coeff - Sensitivity

-1500

-2200

-2500

PPM/°C

-40°C to 150°C

 

Thermal Hysteresis

-0.2

0

0.2

% FSO

Zero pressure

 

Burst Pressure

3X

 

 

 

Full scale pressure

Full-Scale Output (@ 5 volts) Other outputs available upon request

 

5 psi (.34 bar; 43.5 KPa)

62.5

75

87.5

mV

 

 

100 psi (6.9 bar; 689 KPa)

125

150

175

mV

 

 

300 psi (20.7 bar 2068 KPa)

120

150

180

mV

 

 

500 psi (34.5 bar 3447 KPa)

150

175

200

mV

 

 

 

ELECTRICAL

Pin

Bridge Closed

Bridge Half

1

Out+

Out+

2

In+

In+

3

In-

In-

4

Out-

Out-

5

 

In-

 

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