Piezoresistive Pressure Sensors

Piezoresistive Pressure Sensors ( 압저항식 압력센서, harsh media...)

DaiL IBC 2010. 3. 18. 17:45

HM Series harsh media, absolute

 

The HM Series is ideal for high-volume,
low and medium pressure, harsh-media OEM applications.

 

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FEATURES

Range

100 to 500 psi (7 to 34.5 bar; 700 to 3,447 KPa)

Type

Absolute; pressurized from cavity side

Media

Air, gasses and liquids that are compatible with silicon and glass

Shipping

Wafers on tape

Flexibility

Sensitivity, resistance, bridge, constraint, ect.

 


BENEFITS

Performance

Enjoy best-in-class performance due to Merit's
proprietary Sentium technology

Cost

Save money over time with high-performing die

Security

Feel confident doing business with an experienced
company backed by a solid parent company (NASDAQ: MMSI)

Speed

Get to market quickly with creative and flexible solutions.

Service

Experience prompt, personal and professional support.

 

 

 

 

SPECIFICATIONS
 

Parameter

Minimum

Typical

Maximum

Units

Notes

Electrical & Environmental

 

Excitation

5

15

V

Maximum: 3mA

 

Impedance

4000

5000

6000

Ω

Optional: 3,500 +/- 500

 

Operating Temperature

-40

 

150

°C

Sentium® technology

 

Storage Temperature

-55

 

160

°C

Sentium® technology

Performance

 

Offset

-10

0

10

mV/V

Zero pressure; gage only; @25°C

 

Non-linearity

-0.2

0

0.2

% FSO

Best Fit Straight Line; @25°C

 

Pressure Hysteresis

-0.1

0

0.1

% FSO

@25°C

 

Temp Coeff - Zero

-25

0

25

µV/V/°C

-40°C to 150°C

 

Temp Coeff - Resistance

2300

2800

3300

PPM/°C

-40°C to 150°C

 

Temp Coeff - Sensitivity

-1500

-2200

-2500

PPM/°C

-40°C to 150°C

 

Long-Term Stability

-0.2

0

0.2

% FSO

 

 

Burst Pressure

5X

 

 

 

Full scale pressure

Full-Scale Output (@ 5 volts) Other outputs available upon request

 

100 psi (6.9 bar; 689 KPa)

120

150

180

mV

 

 

300 psi (20.7 bar 2,068 KPa)

120

150

180

mV

 

 

500 psi (34.5 bar 3,447 KPa)

140

175

210

mV

 

ELECTRICAL

 

 

Pad

Symbol

Description

1/5/8

Vin+

Supply Voltage

2/6

Vin-

Supply Voltage

3/7

Vout+*

Output Voltage

4

Vout-*

Output Voltage


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