Piezoresistive Pressure Sensors

Piezoresistive Pressure Sensors (medium pressure, 압저항식 압력센서)

DaiL IBC 2010. 3. 18. 18:22

AP301 Series medium pressure

 

The AP301 Series is ideal for high-volume,
medium-pressure OEM applications.

 

 

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FEATURES

Range

100 to 1,000 psi (6.9 to 68.9 bar; 689 to 6,895 KPa)

Type

Absolute, gage, differential and vacuum

Media

Clean, dry air and non-corrosive gasses

Shipping

Wafers on tape

Flexibility

Sensitivity, resistance, bridge, constraint, ect.


BENEFITS

Performance

Enjoy best-in-class performance due to Merit's
proprietary Sentium technology

Cost

Save money over time with high-performing die

Security

Feel confident doing business with an experienced
company backed by a solid parent company (NASDAQ: MMSI)

Speed

Get to market quickly with creative and flexible solutions.

Service

Experience prompt, personal and professional support.

 

               

 

 

SPECIFICATIONS


 

Parameter

Minimum

Typical

Maximum

Units

Notes

Electrical & Environmental

 

Excitation

5

15

V

Maximum: 3 mA

 

Impedance

4000

5000

6000

Ω

Optional: 3,500 +/- 500

 

Operating Temperature

-40

 

150

°C

Sentium® technology

 

Storage Temperature

-55

 

160

°C

Sentium® technology

Performance

 

Offset

-10

0

10

mV/V

Zero pressure; gage only; @25°C

 

Non-linearity

-0.15

0

0.15

% FSO

Best Fit Straight Line; @25°C

 

Pressure Hysteresis

-0.05

0

0.05

% FSO

@25°C

 

Temp Coeff - Zero

-25

0

25

µV/V/°C

-40°C to 150°C

 

Temp Coeff - Resistance

2100

2800

3900

PPM/°C

-40°C to 150°C

 

Temp Coeff - Sensitivity

-1500

-2200

-2500

PPM/°C

-40°C to 150°C

 

Thermal Hysteresis

-0.1

0

0.1

% FSO

Zero pressure

 

Long-Term Stability

-0.1

0

0.1

% FSO

 

 

Burst Pressure

3X

 

 

 

Full scale pressure

Full-Scale Output (@ 5 volts) Other outputs available upon request

 

100 psi (6.9 bar; 689 KPa)

125

150

175

mV

 

 

300 psi (20 bar; 2,068 KPa)

120

150

180

mV

 

 

500 psi (34.5 bar 3,447 KPa)

150

175

200

mV

 

 

1000 psi (68.9 bar 6,895 KPa)

125

150

175

mV

 

 

 

ELECTRICAL

 

 

Pad

Symbol

Description

12/6

Vin+

Supply Voltage

1/5/7

Vin-

Supply Voltage

4

Vout-*

Output Voltage

3

Vout+*

Output Voltage

*Top side pressure. Reversed if using backside pressure.

 

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