Piezoresistive Pressure Sensors ( high pressure, 압저항식 압력센서 )

5000 Series high pressure

 

The 5000 Series is ideal for high-volume,
high-pressure OEM applications.

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FEATURES
Range	1,000 to 10,000 psi (69 to 689 bar; 6,895 to 68,948 KPa)
Type	Absolute
Media	Clean, dry air and non-corrosive gasses
Shipping	Wafers on tape
Flexibility	Sensitivity, resistance, bridge, constraint, ect.

BENEFITS
Performance	Enjoy best-in-class performance due to Merit's proprietary Sentium technology
Cost	Save money over time with high-performing die
Security	Feel confident doing business with an experienced company backed by a solid parent company (NASDAQ: MMSI)
Speed	Get to market quickly with creative and flexible solutions.
Service	Experience prompt, personal and professional support.

 

 

 

 

SPECIFICATIONS   Parameter Minimum Typical Maximum Units Notes Electrical & Environmental   Excitation 5 15 V Maximum: 3mA   Impedance 4000 5000 6000 Ω Optional: 3,500 +/- 500   Operating Temperature -40   150 °C Sentium® technology   Storage Temperature -55   160 °C Sentium® technology Performance   Offset -10 0 10 mV/V Zero pressure; gage only; @25°C   Non-linearity -0.15 0 0.15 % FSO BFSL; @25°C; 0 +/- .35 (>5,000 psi)   Pressure Hysteresis -0.05 0 0.05 % FSO @25°C   Temp Coeff - Zero -25 0 25 µV/V/°C -40°C to 150°C   Temp Coeff - Resistance 2100 2800 3900 PPM/°C -40°C to 150°C   Temp Coeff - Sensitivity -1500 -2200 -2500 PPM/°C -40°C to 150°C   Thermal Hysteresis -0.1 0 0.1 % FSO Zero pressure   Long-Term Stability -0.1 0 0.1 % FSO     Burst Pressure 3X       Full scale pressure Full-Scale Output (@ 5 volts) Other outputs available upon request   1,000 psi (68.9 bar; 6,895 KPa) 105 125 145 mV     3,000 psi (207 bar; 20,684 KPa) 450 180 210 mV     5,000 psi (345 bar 34,474 KPa) 165 200 235 mV     10,000 psi (689 bar 68,948 KPa) 165 200 235 mV

ELECTRICAL     Pad Symbol Description 1/5 Vin+ Supply Voltage 2/6/7 Vin- Supply Voltage 3 Vout-* Output Voltage 4 Vout+* Output Voltage

 

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